Plasma scaling

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21	Proposed list of topics for the workshop[removed]nm plasma sources to support high volume manufacturing (HVM) scanners Update on performance of high power EUV Sources Approaches to power scaling to enable 500 W - 1 kW E Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-08-14 22:44:49 Extreme ultraviolet lithography Extreme ultraviolet Ultraviolet
22	PDF Document Add to Reading List Source URL: fti.neep.wisc.edu Language: English - Date: 2003-02-25 17:14:32 Plasma Magnetic reconnection Compact toroid Nuclear fusion Field-reversed configuration Spheromak Beta Lawson criterion Plasma scaling Physics Plasma physics Fusion power